Semiconductor Gas Monitor Data Acquisition and Remote Monitoring System

Currently, chip etching stands as a pivotal technology within China's semiconductor industry.

 This process primarily leverages chemical reactions to etch away unwanted portions of a chip's surface, facilitating the fabrication of chip circuits. During semiconductor production, numerous special gases are utilized, many of which are toxic and corrosive, such as hydrogen chloride, hydrogen bromide, and hydrogen fluoride.

The Importance of Timely and Accurate Detection

The prompt and precise detection of harmful gas overexposure, coupled with swift alerts, plays a crucial role in ensuring production environment safety and the well-being of employees. Deploying harmful gas monitors on-site enables 24/7 continuous real-time online monitoring. In response, WideIOT offers an industrial IoT-based solution to facilitate data acquisition and remote monitoring of various harmful gas monitors within factories, thereby enhancing safety management and response capabilities.

Compliance with National Standards and Industry Requirements

According to national policy standards and industry production requirements, harmful gas monitors are typically installed at exhaust vents or environmental points and integrated with automatic control system PLCs to achieve interlocking actions with ventilation and exhaust equipment, ensuring rapid shutdown of all gas sources in case of anomalies. The operational status of these devices is paramount for swift responses.

Solution Implementation

By deploying WideIOT Industrial Smart Gateways at exhaust vents and environmental points, and connecting them to harmful gas monitors and PLCs, real-time data acquisition and uploading to local HMIs or cloud platforms can be achieved. This constructs a real-time, efficient communication network capable of detecting harmful gas overexposure and triggering rapid alarms, enabling timely management and control measures to safeguard production and personnel safety.

Automated Alerts and Notifications

Enterprises can preset alarm thresholds and notification methods. When the gateway detects abnormal overexposure data, it automatically triggers alarms and notifies personnel via WeChat, SMS, email, or audible/visual signals, prompting immediate action such as shutdowns,风机 (fan) start/stop operations to protect personnel and prevent accidents caused by manual monitoring errors.

Data Analysis and Predictive Maintenance

Through comparative analysis of real-time and historical data, combined with operational maintenance experience, equipment maintenance cycles and production habits can be rationally adjusted to ensure orderly inspection and maintenance work orders. Furthermore, data analysis facilitates predictive maintenance, further enhancing safety management levels and proactively preventing potential hazards.